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Determining the elastic modulus and hardness of an ultra-thin film on a substrate using nanoindentation

Li, H. / Vlassak, J.J.

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Determining the elastic modulus and hardness of an ultra-thin film on a substrate using nanoindentation

Li, H. / Vlassak, J.J.

Determining the elastic modulus and hardness of an ultra-thin film on a substrate using nanoindentation

Li, H. / Vlassak, J.J.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Determining the elastic modulus and hardness of an ultra-thin film on a substrate using nanoindentation

Contributors:

Li, H. (author) / Vlassak, J.J. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 24 ; 1114-1126

Publication date:

2009-01-01

Size:

13 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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