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Plastic deformation in 200mm silicon wafers arising from mechanical loads in vertical-type and horizontal-type furnaces
Plastic deformation in 200mm silicon wafers arising from mechanical loads in vertical-type and horizontal-type furnaces
Plastic deformation in 200mm silicon wafers arising from mechanical loads in vertical-type and horizontal-type furnaces
Fischer, A. (author) / Kissinger, G. (author) / Ritter, G. (author) / Akhmetov, V. (author) / Kittler, M. (author)
MATERIALS SCIENCE AND ENGINEERING B ADVANCED FUNCTIONAL SOLID STATE MATERIALS ; 159-160 ; 103-106
2009-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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