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Thermal processing induced plastic deformation in GaAs wafers

Mock, P. / Laczik, Z. J. / Booker, G. R.

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Thermal processing induced plastic deformation in GaAs wafers

Mock, P. / Laczik, Z. J. / Booker, G. R.

Thermal processing induced plastic deformation in GaAs wafers

Mock, P. / Laczik, Z. J. / Booker, G. R.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Thermal processing induced plastic deformation in GaAs wafers

Contributors:

Mock, P. (author) / Laczik, Z. J. (author) / Booker, G. R. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 80 ; 91 - 94

Publication date:

2001-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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