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Nanocavities in silicon: An infrared investigation of internal surface reconstruction after hydrogen implantation

Romano, E. / Narducci, D. / Corni, F. / Frabboni, S. / Ottaviani, G. / Tonini, R. / Cerofolini, G. F.

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Nanocavities in silicon: An infrared investigation of internal surface reconstruction after hydrogen implantation

Romano, E. / Narducci, D. / Corni, F. / Frabboni, S. / Ottaviani, G. / Tonini, R. / Cerofolini, G. F.

Nanocavities in silicon: An infrared investigation of internal surface reconstruction after hydrogen implantation

Romano, E. / Narducci, D. / Corni, F. / Frabboni, S. / Ottaviani, G. / Tonini, R. / Cerofolini, G. F.

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Check availability in my library

Order at Subito €

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Document information

Title:

Nanocavities in silicon: An infrared investigation of internal surface reconstruction after hydrogen implantation

Contributors:

Romano, E. (author) / Narducci, D. (author) / Corni, F. (author) / Frabboni, S. (author) / Ottaviani, G. (author) / Tonini, R. (author) / Cerofolini, G. F. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B ADVANCED FUNCTIONAL SOLID STATE MATERIALS ; 159-160 ; 173-176

Publication date:

2009-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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