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Inverted Pyramid Defects in 4H-SiC Epilayers
Inverted Pyramid Defects in 4H-SiC Epilayers
Inverted Pyramid Defects in 4H-SiC Epilayers
Shrivastava, A. (author) / Muzykov, P.G. (author) / Sudarshan, T.S. (author)
MATERIALS SCIENCE FORUM ; 615/617 ; 125-128
2009-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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