Crystalline Quality and Surface Morphology of 3C-SiC Films on Si Evaluated by Electron Channeling Contrast Imaging: Fid-Bau Portal

Crystalline Quality and Surface Morphology of 3C-SiC Films on Si Evaluated by Electron Channeling Contrast Imaging

Picard, Y.N. / Locke, C. / Frewin, C.L. / Twigg, M.E. / Saddow, S.E.

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Crystalline Quality and Surface Morphology of 3C-SiC Films on Si Evaluated by Electron Channeling Contrast Imaging

Picard, Y.N. / Locke, C. / Frewin, C.L. / Twigg, M.E. / Saddow, S.E.

Crystalline Quality and Surface Morphology of 3C-SiC Films on Si Evaluated by Electron Channeling Contrast Imaging

Picard, Y.N. / Locke, C. / Frewin, C.L. / Twigg, M.E. / Saddow, S.E.

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Document information

Title:

Crystalline Quality and Surface Morphology of 3C-SiC Films on Si Evaluated by Electron Channeling Contrast Imaging

Contributors:

Picard, Y.N. (author) / Locke, C. (author) / Frewin, C.L. (author) / Twigg, M.E. (author) / Saddow, S.E. (author)

Published in:

MATERIALS SCIENCE FORUM ; 615/617 ; 435-438

Publication date:

2009-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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