Growth and Microstructure of Epitaxial Ti~3SiC~2 Contact Layers on SiC: Fid-Bau Portal

Growth and Microstructure of Epitaxial Ti~3SiC~2 Contact Layers on SiC

Tsukimoto, S. / Ito, K. / Wang, Z. / Saito, M. / Ikuhara, Y. / Murakami, M.

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Growth and Microstructure of Epitaxial Ti~3SiC~2 Contact Layers on SiC

Tsukimoto, S. / Ito, K. / Wang, Z. / Saito, M. / Ikuhara, Y. / Murakami, M.

Growth and Microstructure of Epitaxial Ti~3SiC~2 Contact Layers on SiC

Tsukimoto, S. / Ito, K. / Wang, Z. / Saito, M. / Ikuhara, Y. / Murakami, M.

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Check availability in my library

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Document information

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Document information

Title:

Growth and Microstructure of Epitaxial Ti~3SiC~2 Contact Layers on SiC

Contributors:

Tsukimoto, S. (author) / Ito, K. (author) / Wang, Z. (author) / Saito, M. (author) / Ikuhara, Y. (author) / Murakami, M. (author)

Published in:

MATERIALS TRANSACTIONS ; 50 ; 1071-1075

Publication date:

2009-01-01

Size:

5 pages

ISSN:

1345-9678

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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