A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Environmentally Benign Material Removal Processes for the Fabrication of Microdevices
Environmentally Benign Material Removal Processes for the Fabrication of Microdevices
Environmentally Benign Material Removal Processes for the Fabrication of Microdevices
Danyluk, S. (author) / Blackburn, T. (author) / Butler, D. (author) / Seng, L.C. (author)
MATERIALS SCIENCE FORUM ; 620/622 ; 451-456
2009-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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