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Epitaxial CoSi~2 formation using an oxynitride buffer layer

Lee, J. / Lee, K. / Kim, D. / Park, T. / Kim, H. / Jeon, H.

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Epitaxial CoSi~2 formation using an oxynitride buffer layer

Lee, J. / Lee, K. / Kim, D. / Park, T. / Kim, H. / Jeon, H.

Epitaxial CoSi~2 formation using an oxynitride buffer layer

Lee, J. / Lee, K. / Kim, D. / Park, T. / Kim, H. / Jeon, H.

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Check availability in my library

Order at Subito €

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Document information

Title:

Epitaxial CoSi~2 formation using an oxynitride buffer layer

Contributors:

Lee, J. (author) / Lee, K. (author) / Kim, D. (author) / Park, T. (author) / Kim, H. (author) / Jeon, H. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 24 ; 2705-2710

Publication date:

2009-01-01

Size:

6 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Prabhakaran, K. / Sumitomo, K. / Ogino, T. | British Library Online Contents | 1997

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Mantl, S. / Michel, I. / Guggi, D. et al. | British Library Online Contents | 1993

Formation and characterization of epitaxial CoSi~2 on Si(001)

La Via, F. / Spinella, C. / Reader, A. H. et al. | British Library Online Contents | 1993

Formation and characterization of Si/CoSi~2/Si epitaxial heterostructures

La Via, F. / Ravesi, S. / Terrasi, A. et al. | British Library Online Contents | 1993

Epitaxial growth of CoSi~2/Si structures

Bulle-Lieuwma, C. W. T. | British Library Online Contents | 1993