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    Formation of buried epitaxial CoSi~2 layer through diffusion mediated reaction

    New search for: Prabhakaran, K.
    New search for: Sumitomo, K.
    New search for: Ogino, T.

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    Formation of buried epitaxial CoSi~2 layer through diffusion mediated reaction

    New search for: Prabhakaran, K.
    New search for: Sumitomo, K.
    New search for: Ogino, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Formation of buried epitaxial CoSi~2 layer through diffusion mediated reaction

    New search for: Prabhakaran, K.
    New search for: Sumitomo, K.
    New search for: Ogino, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
    Similar titles

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    Document information
    Title:

    Formation of buried epitaxial CoSi~2 layer through diffusion mediated reaction

    Contributors:

    Prabhakaran, K. (author) / Sumitomo, K. (author) / Ogino, T. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 117/118 ; 280-284

    Publication date:

    1997-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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