Microstructure, optical and electrical properties of nitrogen doped sp^2-rich a-C thin films grown by facing-target magnetron sputtering: Fid-Bau Portal

Microstructure, optical and electrical properties of nitrogen doped sp^2-rich a-C thin films grown by facing-target magnetron sputtering

Wu, J. Q. / Wang, X. C. / Jiang, E. Y. / Bai, H. L.

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Microstructure, optical and electrical properties of nitrogen doped sp^2-rich a-C thin films grown by facing-target magnetron sputtering

Wu, J. Q. / Wang, X. C. / Jiang, E. Y. / Bai, H. L.

Microstructure, optical and electrical properties of nitrogen doped sp^2-rich a-C thin films grown by facing-target magnetron sputtering

Wu, J. Q. / Wang, X. C. / Jiang, E. Y. / Bai, H. L.

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Document information

Title:

Microstructure, optical and electrical properties of nitrogen doped sp^2-rich a-C thin films grown by facing-target magnetron sputtering

Contributors:

Wu, J. Q. (author) / Wang, X. C. (author) / Jiang, E. Y. (author) / Bai, H. L. (author)

Published in:

APPLIED SURFACE SCIENCE ; 255 ; 9498-9503

Publication date:

2009-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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