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    Elastic modulus of low-k dielectric thin films measured by load-dependent contact-resonance atomic force microscopy

    New search for: Stan, G.
    New search for: King, S.W.
    New search for: Cook, R.F.

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    Elastic modulus of low-k dielectric thin films measured by load-dependent contact-resonance atomic force microscopy

    New search for: Stan, G.
    New search for: King, S.W.
    New search for: Cook, R.F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Elastic modulus of low-k dielectric thin films measured by load-dependent contact-resonance atomic force microscopy

    New search for: Stan, G.
    New search for: King, S.W.
    New search for: Cook, R.F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
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    Document information
    Title:

    Elastic modulus of low-k dielectric thin films measured by load-dependent contact-resonance atomic force microscopy

    Contributors:

    Stan, G. (author) / King, S.W. (author) / Cook, R.F. (author)

    Published in:

    JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 24 ; 2960-2964

    Publication date:

    2009-01-01

    Size:

    5 pages

    ISSN:

    0884-2914

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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