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Measuring the elastic modulus and residual stress of freestanding thin films using nanoindentation techniques
Measuring the elastic modulus and residual stress of freestanding thin films using nanoindentation techniques
Measuring the elastic modulus and residual stress of freestanding thin films using nanoindentation techniques
Herbert, E.G. (author) / Oliver, W.C. (author) / de Boer, M.P. (author) / Pharr, G.M. (author)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 24 ; 2974-2985
2009-01-01
12 pages
Article (Journal)
English
DDC:
620.11
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