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UV excimer laser drilled high aspect ratio submicron via hole

Chen, K. H. / Wu, W. / Chu, B. H. / Chang, C. Y. / Lin, J. / Pearton, S. J. / Norton, D. P. / Ren, F.

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UV excimer laser drilled high aspect ratio submicron via hole

Chen, K. H. / Wu, W. / Chu, B. H. / Chang, C. Y. / Lin, J. / Pearton, S. J. / Norton, D. P. / Ren, F.

UV excimer laser drilled high aspect ratio submicron via hole

Chen, K. H. / Wu, W. / Chu, B. H. / Chang, C. Y. / Lin, J. / Pearton, S. J. / Norton, D. P. / Ren, F.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

UV excimer laser drilled high aspect ratio submicron via hole

Contributors:

Chen, K. H. (author) / Wu, W. (author) / Chu, B. H. (author) / Chang, C. Y. (author) / Lin, J. (author) / Pearton, S. J. (author) / Norton, D. P. (author) / Ren, F. (author)

Published in:

APPLIED SURFACE SCIENCE ; 256 ; 183-186

Publication date:

2009-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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