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Pyramid-like nanostructures created by Si homoepitaxy on Si(001)

Galiana, N. / Martin, P. P. / Munuera, C. / Varela, M. / Ocal, C. / Alonso, M. / Ruiz, A.

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Pyramid-like nanostructures created by Si homoepitaxy on Si(001)

Galiana, N. / Martin, P. P. / Munuera, C. / Varela, M. / Ocal, C. / Alonso, M. / Ruiz, A.

Pyramid-like nanostructures created by Si homoepitaxy on Si(001)

Galiana, N. / Martin, P. P. / Munuera, C. / Varela, M. / Ocal, C. / Alonso, M. / Ruiz, A.

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Document information

Title:

Pyramid-like nanostructures created by Si homoepitaxy on Si(001)

Contributors:

Galiana, N. (author) / Martin, P. P. (author) / Munuera, C. (author) / Varela, M. (author) / Ocal, C. (author) / Alonso, M. (author) / Ruiz, A. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 12 ; 52-56

Publication date:

2009-01-01

Size:

5 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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