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Reactive DC Magnetron Sputtering Deposition of Copper Nitride Thin Film

Li, X. / Liu, Z. / Yao, K.

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Reactive DC Magnetron Sputtering Deposition of Copper Nitride Thin Film

Li, X. / Liu, Z. / Yao, K.

Reactive DC Magnetron Sputtering Deposition of Copper Nitride Thin Film

Li, X. / Liu, Z. / Yao, K.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Reactive DC Magnetron Sputtering Deposition of Copper Nitride Thin Film

Contributors:

Li, X. (author) / Liu, Z. (author) / Yao, K. (author)

Published in:

Special Issue on Thin Solid Films and Coatings ; 468-472

JOURNAL OF MATERIALS SCIENCE AND TECHNOLOGY -SHENYANG- ; 23

Publication date:

2007-01-01

Size:

5 pages

ISSN:

1005-0302

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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