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TEM characterization of Si nanowires grown by CVD on Si pre-structured by nanosphere lithography
TEM characterization of Si nanowires grown by CVD on Si pre-structured by nanosphere lithography
TEM characterization of Si nanowires grown by CVD on Si pre-structured by nanosphere lithography
Lindner, J.K.N. (author) / Bahloul-Hourlier, D. (author) / Kraus, D. (author) / Weinl, M. (author) / Melin, T. (author) / Stritzker, B. (author)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 11 ; 169-174
2008-01-01
6 pages
Article (Journal)
English
DDC:
621.38152
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