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Fabrication of Silicon Nanoarrays by Direct Nanosphere Lithography
Fabrication of Silicon Nanoarrays by Direct Nanosphere Lithography
Fabrication of Silicon Nanoarrays by Direct Nanosphere Lithography
Xu, L. (author) / Li, W. (author) / Zhao, W. M. (author) / Sun, P. (author) / Xu, J. (author) / Ma, Z. Y. (author) / Huang, X. F. (author) / Chen, K. J. (author)
SURFACE REVIEW AND LETTERS ; 14 ; 709-712
2007-01-01
4 pages
Article (Journal)
English
DDC:
530.417
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