High-dielectric constant AION prepared by RF gas-timing sputtering for high capacitance density: Fid-Bau Portal

High-dielectric constant AION prepared by RF gas-timing sputtering for high capacitance density

Poyai, A. / Bunjongpru, W. / Klunngien, N. / Porntheerapat, S. / Hruanan, C. / Sopitpan, S. / Nukeaw, J.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

High-dielectric constant AION prepared by RF gas-timing sputtering for high capacitance density

Poyai, A. / Bunjongpru, W. / Klunngien, N. / Porntheerapat, S. / Hruanan, C. / Sopitpan, S. / Nukeaw, J.

High-dielectric constant AION prepared by RF gas-timing sputtering for high capacitance density

Poyai, A. / Bunjongpru, W. / Klunngien, N. / Porntheerapat, S. / Hruanan, C. / Sopitpan, S. / Nukeaw, J.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

High-dielectric constant AION prepared by RF gas-timing sputtering for high capacitance density

Contributors:

Poyai, A. (author) / Bunjongpru, W. (author) / Klunngien, N. (author) / Porntheerapat, S. (author) / Hruanan, C. (author) / Sopitpan, S. (author) / Nukeaw, J. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 11 ; 319-323

Publication date:

2008-01-01

Size:

5 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

Lee, J. / Lee, I. / Chung, H. et al. | British Library Online Contents | 2006

High dielectric constant material

HU WANBIAO / KITCHIN MELANIE / LIU YUN et al. | European Patent Office | 2016

Free access

Synthesis of AION Refractory Raw Materials from Aluminium Dross Using Thermite Reaction Process

Joo, H. / Yun, J. / Hwang, K. et al. | British Library Online Contents | 2006

High-dielectric-constant microwave dielectric ceramic for MLCC and preparation method of high-dielectric-constant microwave dielectric ceramic

YOSHIGISHI / WANG XIAOHUI / KIM JIN-YONG et al. | European Patent Office | 2023

Free access

Ultra-high dielectric constant garnet

CRUICKSHANK DAVID BOWIE / HILL MICHAEL DAVID | European Patent Office | 2017

Free access