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Studies on non-thermal atmospheric pressure plasma process conditions for groove formation on silicon nitride for silicon solar cells

Hamada, T. / Sakoda, T. / Otsubo, M.

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Studies on non-thermal atmospheric pressure plasma process conditions for groove formation on silicon nitride for silicon solar cells

Hamada, T. / Sakoda, T. / Otsubo, M.

Studies on non-thermal atmospheric pressure plasma process conditions for groove formation on silicon nitride for silicon solar cells

Hamada, T. / Sakoda, T. / Otsubo, M.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

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Document information

Title:

Studies on non-thermal atmospheric pressure plasma process conditions for groove formation on silicon nitride for silicon solar cells

Contributors:

Hamada, T. (author) / Sakoda, T. (author) / Otsubo, M. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 12 ; 106-112

Publication date:

2009-01-01

Size:

7 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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