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    Low-temperature formation of silicon nitride films using pulsed-plasma CVD under near atmospheric pressure

    New search for: Matsumoto, M.
    New search for: Inayoshi, Y.
    New search for: Suemitsu, M.
    New search for: Miyamoto, E.
    New search for: Yara, T.
    New search for: Nakajima, S.
    New search for: Uehara, T.
    New search for: Toyoshima, Y.

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    Low-temperature formation of silicon nitride films using pulsed-plasma CVD under near atmospheric pressure

    New search for: Matsumoto, M.
    New search for: Inayoshi, Y.
    New search for: Suemitsu, M.
    New search for: Miyamoto, E.
    New search for: Yara, T.
    New search for: Nakajima, S.
    New search for: Uehara, T.
    New search for: Toyoshima, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Low-temperature formation of silicon nitride films using pulsed-plasma CVD under near atmospheric pressure

    New search for: Matsumoto, M.
    New search for: Inayoshi, Y.
    New search for: Suemitsu, M.
    New search for: Miyamoto, E.
    New search for: Yara, T.
    New search for: Nakajima, S.
    New search for: Uehara, T.
    New search for: Toyoshima, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Low-temperature formation of silicon nitride films using pulsed-plasma CVD under near atmospheric pressure

    Contributors:

    Matsumoto, M. (author) / Inayoshi, Y. (author) / Suemitsu, M. (author) / Miyamoto, E. (author) / Yara, T. (author) / Nakajima, S. (author) / Uehara, T. (author) / Toyoshima, Y. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 254 ; 6208-6210

    Publication date:

    2008-01-01

    Size:

    3 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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