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    Identification of SiC polytypes by etched Si-face morphology

    New search for: Yang, Y.
    New search for: Chen, Z.

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    Identification of SiC polytypes by etched Si-face morphology

    New search for: Yang, Y.
    New search for: Chen, Z.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Identification of SiC polytypes by etched Si-face morphology

    New search for: Yang, Y.
    New search for: Chen, Z.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Identification of SiC polytypes by etched Si-face morphology

    Contributors:

    Yang, Y. (author) / Chen, Z. (author)

    Published in:

    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 12 ; 113-117

    Publication date:

    2009-01-01

    Size:

    5 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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