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Characterization of Y2O3 gate dielectric on n-GaAs substrates

Das, P. S. / Dalapati, G. K. / Chi, D. Z. / Biswas, A. / Maiti, C. K.

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Characterization of Y2O3 gate dielectric on n-GaAs substrates

Das, P. S. / Dalapati, G. K. / Chi, D. Z. / Biswas, A. / Maiti, C. K.

Characterization of Y2O3 gate dielectric on n-GaAs substrates

Das, P. S. / Dalapati, G. K. / Chi, D. Z. / Biswas, A. / Maiti, C. K.

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Check availability in my library

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Document information

Title:

Characterization of Y2O3 gate dielectric on n-GaAs substrates

Contributors:

Das, P. S. (author) / Dalapati, G. K. (author) / Chi, D. Z. (author) / Biswas, A. (author) / Maiti, C. K. (author)

Published in:

APPLIED SURFACE SCIENCE ; 256 ; 2245-2251

Publication date:

2010-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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