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Assessment of adhesion between thin film and silicon based on a scratch test

Lee, J. E. / Kim, H. J. / Kim, D. E.

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Assessment of adhesion between thin film and silicon based on a scratch test

Lee, J. E. / Kim, H. J. / Kim, D. E.

Assessment of adhesion between thin film and silicon based on a scratch test

Lee, J. E. / Kim, H. J. / Kim, D. E.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Assessment of adhesion between thin film and silicon based on a scratch test

Contributors:

Lee, J. E. (author) / Kim, H. J. (author) / Kim, D. E. (author)

Published in:

JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY ; 24 ; 97-101

Publication date:

2010-01-01

Size:

5 pages

ISSN:

1738-494X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621

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