Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Capability Testing Based on Subsamples: A Case on Photolithography Process Control in Wafer Fabrication

    New search for: Liao, M.-Y.
    New search for: Kang, H.-Y.
    New search for: Lee, A.H.I.
    New search for: Wu, C.-W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Capability Testing Based on Subsamples: A Case on Photolithography Process Control in Wafer Fabrication

    New search for: Liao, M.-Y.
    New search for: Kang, H.-Y.
    New search for: Lee, A.H.I.
    New search for: Wu, C.-W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Capability Testing Based on Subsamples: A Case on Photolithography Process Control in Wafer Fabrication

    New search for: Liao, M.-Y.
    New search for: Kang, H.-Y.
    New search for: Lee, A.H.I.
    New search for: Wu, C.-W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Capability Testing Based on Subsamples: A Case on Photolithography Process Control in Wafer Fabrication

    Contributors:

    Liao, M.-Y. (author) / Kang, H.-Y. (author) / Lee, A.H.I. (author) / Wu, C.-W. (author)

    Published in:

    JOURNAL OF TESTING AND EVALUATION ; 38 ; 222-231

    Publication date:

    2010-01-01

    Size:

    10 pages

    ISSN:

    0090-3973

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Mathematical Statistics Method for Determining the Minimum Number of Subsamples Required during a Geat Test

    Jie, L. / Jun, X. / Qing-rui, H. | British Library Online Contents | 2000

    A new perspective on the ripple effect in the UK housing market: Comovement, cyclical subsamples and alternative indices

    Steve Cook | Online Contents | 2016

    Controlled Fabrication of Large-Scale Aligned Carbon Nanofiber/Nanotube Patterns by Photolithography

    Huang, S. / Dai, L. / Mau, A. W. H. | British Library Online Contents | 2002

    SU-8 nano-nozzle fabrication for electrohydrodynamic jet printing using UV photolithography

    Wang, Jili / Yin, Zhifu | British Library Online Contents | 2018

    Statistical process control in machining, a case study for machine tool capability and process capability

    Motorcu, A. R. / Güllü, A. | British Library Online Contents | 2006

    Back to top