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Nitrogen bonding in aluminum oxynitride films

Wang, P. W. / Hsu, J. C. / Lin, Y. H. / Chen, H. L.

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Nitrogen bonding in aluminum oxynitride films

Wang, P. W. / Hsu, J. C. / Lin, Y. H. / Chen, H. L.

Nitrogen bonding in aluminum oxynitride films

Wang, P. W. / Hsu, J. C. / Lin, Y. H. / Chen, H. L.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Nitrogen bonding in aluminum oxynitride films

Contributors:

Wang, P. W. (author) / Hsu, J. C. (author) / Lin, Y. H. (author) / Chen, H. L. (author)

Published in:

APPLIED SURFACE SCIENCE ; 256 ; 4211-4214

Publication date:

2010-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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