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Nitrogen bonding in aluminum oxynitride films
Nitrogen bonding in aluminum oxynitride films
Nitrogen bonding in aluminum oxynitride films
Wang, P. W. (Autor:in) / Hsu, J. C. (Autor:in) / Lin, Y. H. (Autor:in) / Chen, H. L. (Autor:in)
APPLIED SURFACE SCIENCE ; 256 ; 4211-4214
01.01.2010
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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