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Stress gradients observed in Cu thin films induced by capping layers
Stress gradients observed in Cu thin films induced by capping layers
Stress gradients observed in Cu thin films induced by capping layers
Murray, C.E. (author) / Besser, P.R. (author) / Witt, C. (author) / Jordan-Sweet, J.L. (author)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 25 ; 622-628
2010-01-01
7 pages
Article (Journal)
English
DDC:
620.11
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