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Dislocation Conversion and Propagation during Homoepitaxial Growth of 4H-SiC
Dislocation Conversion and Propagation during Homoepitaxial Growth of 4H-SiC
Dislocation Conversion and Propagation during Homoepitaxial Growth of 4H-SiC
Kallinger, B. (author) / Thomas, B. (author) / Polster, S. (author) / Berwian, P. (author) / Friedrich, J. (author) / Bauer, A.J. / Friedrichs, P. / Krieger, M. / Pensl, G. / Rupp, R.
2010-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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