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Effects of Helium Implantation on the Mechanical Properties of 4H-SiC
Effects of Helium Implantation on the Mechanical Properties of 4H-SiC
Effects of Helium Implantation on the Mechanical Properties of 4H-SiC
Barbot, J.F. (author) / Beaufort, M.F. (author) / Audurier, V. (author) / Bauer, A.J. / Friedrichs, P. / Krieger, M. / Pensl, G. / Rupp, R. / Seyller, T.
2010-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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