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Analyses of High Leakage Currents in Al^+ Implanted 4H SiC pn Diodes Caused by Threading Screw Dislocations
Analyses of High Leakage Currents in Al^+ Implanted 4H SiC pn Diodes Caused by Threading Screw Dislocations
Analyses of High Leakage Currents in Al^+ Implanted 4H SiC pn Diodes Caused by Threading Screw Dislocations
Tsuji, T. (author) / Tawara, T. (author) / Tanuma, R. (author) / Yonezawa, Y. (author) / Iwamuro, N. (author) / Kosaka, K. (author) / Yurimoto, H. (author) / Kobayashi, S. (author) / Matsuhata, H. (author) / Fukuda, K. (author)
2010-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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