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Analyses of High Leakage Currents in Al^+ Implanted 4H SiC pn Diodes Caused by Threading Screw Dislocations
Analyses of High Leakage Currents in Al^+ Implanted 4H SiC pn Diodes Caused by Threading Screw Dislocations
Analyses of High Leakage Currents in Al^+ Implanted 4H SiC pn Diodes Caused by Threading Screw Dislocations
Tsuji, T. (Autor:in) / Tawara, T. (Autor:in) / Tanuma, R. (Autor:in) / Yonezawa, Y. (Autor:in) / Iwamuro, N. (Autor:in) / Kosaka, K. (Autor:in) / Yurimoto, H. (Autor:in) / Kobayashi, S. (Autor:in) / Matsuhata, H. (Autor:in) / Fukuda, K. (Autor:in)
01.01.2010
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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