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Sol–gel deposited SiO2 and hybrid low dielectric constant thin films

Joshi, B. N. / Mahajan, A. M.

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Sol–gel deposited SiO2 and hybrid low dielectric constant thin films

Joshi, B. N. / Mahajan, A. M.

Sol–gel deposited SiO2 and hybrid low dielectric constant thin films

Joshi, B. N. / Mahajan, A. M.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Sol–gel deposited SiO2 and hybrid low dielectric constant thin films

Contributors:

Joshi, B. N. (author) / Mahajan, A. M. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 13 ; 41-45

Publication date:

2010-01-01

Size:

5 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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