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Vapor Deposition of Low-Dielectric-Constant Polymeric Thin Films

Lu, T.-M. / Moore, J. A.

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Vapor Deposition of Low-Dielectric-Constant Polymeric Thin Films

Lu, T.-M. / Moore, J. A.

Vapor Deposition of Low-Dielectric-Constant Polymeric Thin Films

Lu, T.-M. / Moore, J. A.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Vapor Deposition of Low-Dielectric-Constant Polymeric Thin Films

Contributors:

Lu, T.-M. (author) / Moore, J. A. (author)

Published in:

MRS BULLETIN- MATERIALS RESEARCH SOCIETY ; 22 ; 28-32

Publication date:

1997-01-01

Size:

5 pages

ISSN:

0883-7694

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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