Deposition and electrostatic removal of gaseous organic contaminants on substrate surfaces: Fid-Bau Portal

Deposition and electrostatic removal of gaseous organic contaminants on substrate surfaces

Shiue, A. / Tien, D. C. / Den, W. / Hu, S. C. / Hsu, C. S.

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Deposition and electrostatic removal of gaseous organic contaminants on substrate surfaces

Shiue, A. / Tien, D. C. / Den, W. / Hu, S. C. / Hsu, C. S.

Deposition and electrostatic removal of gaseous organic contaminants on substrate surfaces

Shiue, A. / Tien, D. C. / Den, W. / Hu, S. C. / Hsu, C. S.

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Check availability in my library

Order at Subito €

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Document information

Title:

Deposition and electrostatic removal of gaseous organic contaminants on substrate surfaces

Contributors:

Shiue, A. (author) / Tien, D. C. (author) / Den, W. (author) / Hu, S. C. (author) / Hsu, C. S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 256 ; 6113-6116

Publication date:

2010-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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