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Fabrication of a Large-Area Silicon Mold with Microstructures Using a Novel Recombining Technique

Wu, C.W. / Chi, C.H. / Tsai, H.Y. / Shen, Y.K.

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Fabrication of a Large-Area Silicon Mold with Microstructures Using a Novel Recombining Technique

Wu, C.W. / Chi, C.H. / Tsai, H.Y. / Shen, Y.K.

Fabrication of a Large-Area Silicon Mold with Microstructures Using a Novel Recombining Technique

Wu, C.W. / Chi, C.H. / Tsai, H.Y. / Shen, Y.K.

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Document information

Title:

Fabrication of a Large-Area Silicon Mold with Microstructures Using a Novel Recombining Technique

Contributors:

Wu, C.W. (author) / Chi, C.H. (author) / Tsai, H.Y. (author) / Shen, Y.K. (author) / Wang, J. / Mathew, P. / Li, X. / Huang, C. / Zhu, H.

Published in:

Advances in Materials Processing IX ; 213-218

KEY ENGINEERING MATERIALS ; 443

Publication date:

2010-01-01

Size:

6 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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