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Fast fabrication of silicon based microstructures using 355 nm UV laser

Pan, C. T. / Huang, Y. M. / Hsieh, C. W.

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Fast fabrication of silicon based microstructures using 355 nm UV laser

Pan, C. T. / Huang, Y. M. / Hsieh, C. W.

Fast fabrication of silicon based microstructures using 355 nm UV laser

Pan, C. T. / Huang, Y. M. / Hsieh, C. W.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Fast fabrication of silicon based microstructures using 355 nm UV laser

Contributors:

Pan, C. T. (author) / Huang, Y. M. (author) / Hsieh, C. W. (author)

Published in:

MATERIALS SCIENCE AND TECHNOLOGY -LONDON- ; 21 ; 1344-1348

Publication date:

2005-01-01

Size:

5 pages

ISSN:

0267-0836

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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