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Microstructure and Properties of TiAlN/AlN Composite Film Deposited on Cam's Profile by Ion Beam Sputtering Technique
Microstructure and Properties of TiAlN/AlN Composite Film Deposited on Cam's Profile by Ion Beam Sputtering Technique
Microstructure and Properties of TiAlN/AlN Composite Film Deposited on Cam's Profile by Ion Beam Sputtering Technique
Guo, P.Q. (author) / Wang, S.R. (author) / Cui, H.Y. (author) / Wang, J. / Mathew, P. / Li, X. / Huang, C. / Zhu, H.
2010-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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