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TiAlN coatings deposited by triode magnetron sputtering varying the bias voltage

Devia, D. M. / Restrepo-Parra, E. / Arango, P. J. / Tschiptschin, A. P. / Velez, J. M.

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TiAlN coatings deposited by triode magnetron sputtering varying the bias voltage

Devia, D. M. / Restrepo-Parra, E. / Arango, P. J. / Tschiptschin, A. P. / Velez, J. M.

TiAlN coatings deposited by triode magnetron sputtering varying the bias voltage

Devia, D. M. / Restrepo-Parra, E. / Arango, P. J. / Tschiptschin, A. P. / Velez, J. M.

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Document information

Title:

TiAlN coatings deposited by triode magnetron sputtering varying the bias voltage

Contributors:

Devia, D. M. (author) / Restrepo-Parra, E. (author) / Arango, P. J. (author) / Tschiptschin, A. P. (author) / Velez, J. M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 257 ; 6181-6185

Publication date:

2011-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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