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Fabrication of 3D Metamaterial Resonators Using Self-Aligned Membrane Projection Lithography
Fabrication of 3D Metamaterial Resonators Using Self-Aligned Membrane Projection Lithography
Fabrication of 3D Metamaterial Resonators Using Self-Aligned Membrane Projection Lithography
Burckel, D. B. (author) / Wendt, J. R. (author) / Ten Eyck, G. A. (author) / Ellis, A. R. (author) / Brener, I. (author) / Sinclair, M. B. (author)
ADVANCED MATERIALS -DEERFIELD BEACH THEN WEINHEIM- ; 22 ; 3171-3175
2010-01-01
5 pages
Article (Journal)
English
DDC:
620.11
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