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TITANIUM NITRIDE HARD MASK AND ETCH RESIDUE REMOVAL

European Patent Office | 2016

TITANIUM NITRIDE HARD MASK AND ETCH RESIDUE REMOVAL

CASTEEL JR WILLIAM JACK / INAOKA SEIJI / LIU WEN DAR et al. | European Patent Office | 2016

The Process Transfer of Oxygen Reactive Ion Etching of Polyimide between Different Etch Equipments

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Investigation of etch characteristics of non-polar GaN by wet chemical etching

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