C-V analysis of rapidly thermal annealed SF6 plasma treated AlGaN/GaN heterostructures: Fid-Bau Portal

C-V analysis of rapidly thermal annealed SF6 plasma treated AlGaN/GaN heterostructures

Osvald, J. / Lalinsky, T. / Vanko, G. / Hascik, S. / Vincze, A.

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C-V analysis of rapidly thermal annealed SF6 plasma treated AlGaN/GaN heterostructures

Osvald, J. / Lalinsky, T. / Vanko, G. / Hascik, S. / Vincze, A.

C-V analysis of rapidly thermal annealed SF6 plasma treated AlGaN/GaN heterostructures

Osvald, J. / Lalinsky, T. / Vanko, G. / Hascik, S. / Vincze, A.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

Title:

C-V analysis of rapidly thermal annealed SF6 plasma treated AlGaN/GaN heterostructures

Contributors:

Osvald, J. (author) / Lalinsky, T. (author) / Vanko, G. (author) / Hascik, S. (author) / Vincze, A. (author)

Published in:

APPLIED SURFACE SCIENCE ; 257 ; 1254-1256

Publication date:

2010-01-01

Size:

3 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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