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Simulation of multilayer coating growth in an industrial magnetron sputtering system
Simulation of multilayer coating growth in an industrial magnetron sputtering system
Simulation of multilayer coating growth in an industrial magnetron sputtering system
Panjan, M. (author) / Cekada, M. (author) / Panjan, P. (author)
MATERIALS AND GEOENVIRONMENT ; 57 ; 317-330
2010-01-01
14 pages
Article (Journal)
English
DDC:
669
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