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    Local Coating Conditions in RF-Magnetron Sputtering

    New search for: Berg, G.
    New search for: Friedrich, C.
    New search for: Senf, J.
    New search for: Broszeit, E.
    New search for: Kloos, K.-H.

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    Local Coating Conditions in RF-Magnetron Sputtering

    New search for: Berg, G.
    New search for: Friedrich, C.
    New search for: Senf, J.
    New search for: Broszeit, E.
    New search for: Kloos, K.-H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Local Coating Conditions in RF-Magnetron Sputtering

    New search for: Berg, G.
    New search for: Friedrich, C.
    New search for: Senf, J.
    New search for: Broszeit, E.
    New search for: Kloos, K.-H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Local Coating Conditions in RF-Magnetron Sputtering

    Contributors:

    Berg, G. (author) / Friedrich, C. (author) / Senf, J. (author) / Broszeit, E. (author) / Kloos, K.-H. (author)

    Published in:

    MATERIALWISSENSCHAFT UND WERKSTOFFTECHNIK ; 29 ; 452-458

    Publication date:

    1998-01-01

    Size:

    7 pages

    ISSN:

    0933-5137

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    German

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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