Toughness characteristics of arc enhanced magnetron sputtered SiCN hard films: Fid-Bau Portal

Toughness characteristics of arc enhanced magnetron sputtered SiCN hard films

Wang, Y.F. / Ma, S.L. / Chu, P.K.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Toughness characteristics of arc enhanced magnetron sputtered SiCN hard films

Wang, Y.F. / Ma, S.L. / Chu, P.K.

Toughness characteristics of arc enhanced magnetron sputtered SiCN hard films

Wang, Y.F. / Ma, S.L. / Chu, P.K.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Toughness characteristics of arc enhanced magnetron sputtered SiCN hard films

Contributors:

Wang, Y.F. (author) / Ma, S.L. (author) / Chu, P.K. (author)

Published in:

SURFACE ENGINEERING -LONDON- ; 26 ; 571-577

Publication date:

2010-01-01

Size:

7 pages

ISSN:

0267-0844

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.44

Wei, J. / Gao, Y. / Zhang, D. H. et al. | British Library Online Contents | 2000

Microstructure and optical properties of SiCN thin films deposited by reactive magnetron sputtering

Peng, Y. / Zhou, J. / Gong, J. et al. | British Library Online Contents | 2014

Structural and optical properties of the SiCN thin films prepared by reactive magnetron sputtering

Peng, Y. / Zhou, J. / Zhao, B. et al. | British Library Online Contents | 2011

Fracture toughness and sliding properties of magnetron sputtered CrBC and CrBCN coatings

Wang, Qianzhi / Zhou, Fei / Ma, Qiang et al. | British Library Online Contents | 2018

Corrosion of thin, magnetron sputtered Nb2O5 films

Pillis, Marina Fuser / Geribola, Guilherme Altomari / Scheidt, Guilherme et al. | British Library Online Contents | 2016