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Growth of SiCN films by magnetron sputtering

Wei, J. / Gao, Y. / Zhang, D. H. / Hing, P. / Mo, Z. Q.

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Growth of SiCN films by magnetron sputtering

Wei, J. / Gao, Y. / Zhang, D. H. / Hing, P. / Mo, Z. Q.

Growth of SiCN films by magnetron sputtering

Wei, J. / Gao, Y. / Zhang, D. H. / Hing, P. / Mo, Z. Q.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Growth of SiCN films by magnetron sputtering

Contributors:

Wei, J. (author) / Gao, Y. (author) / Zhang, D. H. (author) / Hing, P. (author) / Mo, Z. Q. (author)

Published in:

SURFACE ENGINEERING -LONDON- ; 16 ; 225-228

Publication date:

2000-01-01

Size:

4 pages

ISSN:

0267-0844

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.44

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