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Fabrication Multi-Layer Polymer Microstructures by X-Ray Lithography with Alignment

Li, Y.G. / Sugiyama, S.

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Fabrication Multi-Layer Polymer Microstructures by X-Ray Lithography with Alignment

Li, Y.G. / Sugiyama, S.

Fabrication Multi-Layer Polymer Microstructures by X-Ray Lithography with Alignment

Li, Y.G. / Sugiyama, S.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Fabrication Multi-Layer Polymer Microstructures by X-Ray Lithography with Alignment

Contributors:

Li, Y.G. (author) / Sugiyama, S. (author) / Huang, Y.M.

Published in:

Optoelectronic Materials ; 1016-1019

MATERIALS SCIENCE FORUM ; 663/665

Publication date:

2011-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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