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    Structure, electrical and optical properties of TiNx films by atmospheric pressure chemical vapor deposition

    New search for: Duan, G.
    New search for: Zhao, G.
    New search for: Wu, L.
    New search for: Lin, X.
    New search for: Han, G.

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    Structure, electrical and optical properties of TiNx films by atmospheric pressure chemical vapor deposition

    New search for: Duan, G.
    New search for: Zhao, G.
    New search for: Wu, L.
    New search for: Lin, X.
    New search for: Han, G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Structure, electrical and optical properties of TiNx films by atmospheric pressure chemical vapor deposition

    New search for: Duan, G.
    New search for: Zhao, G.
    New search for: Wu, L.
    New search for: Lin, X.
    New search for: Han, G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Structure, electrical and optical properties of TiNx films by atmospheric pressure chemical vapor deposition

    Contributors:

    Duan, G. (author) / Zhao, G. (author) / Wu, L. (author) / Lin, X. (author) / Han, G. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 257 ; 2428-2431

    Publication date:

    2011-01-01

    Size:

    4 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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