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    Substrate-temperature dependent structure and composition variations in RF magnetron sputtered titanium nitride thin films

    New search for: Vasu, K.
    New search for: Krishna, M. G.
    New search for: Padmanabhan, K. A.

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    Substrate-temperature dependent structure and composition variations in RF magnetron sputtered titanium nitride thin films

    New search for: Vasu, K.
    New search for: Krishna, M. G.
    New search for: Padmanabhan, K. A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Substrate-temperature dependent structure and composition variations in RF magnetron sputtered titanium nitride thin films

    New search for: Vasu, K.
    New search for: Krishna, M. G.
    New search for: Padmanabhan, K. A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
    Similar titles

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    Document information
    Title:

    Substrate-temperature dependent structure and composition variations in RF magnetron sputtered titanium nitride thin films

    Contributors:

    Vasu, K. (author) / Krishna, M. G. (author) / Padmanabhan, K. A. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 257 ; 3069-3074

    Publication date:

    2011-01-01

    Size:

    6 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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