Fabrication of Nanometer Sized Si Dot Arrays Using Ar Ion Milling with Calixarene Resist Dot Arrays: Fid-Bau Portal

Fabrication of Nanometer Sized Si Dot Arrays Using Ar Ion Milling with Calixarene Resist Dot Arrays

Tamura, T. / Tanaka, Y. / Akahane, T. / Yin, Y. / Hosaka, S.

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Fabrication of Nanometer Sized Si Dot Arrays Using Ar Ion Milling with Calixarene Resist Dot Arrays

Tamura, T. / Tanaka, Y. / Akahane, T. / Yin, Y. / Hosaka, S.

Fabrication of Nanometer Sized Si Dot Arrays Using Ar Ion Milling with Calixarene Resist Dot Arrays

Tamura, T. / Tanaka, Y. / Akahane, T. / Yin, Y. / Hosaka, S.

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Check availability in my library

Order at Subito €

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Document information

Title:

Fabrication of Nanometer Sized Si Dot Arrays Using Ar Ion Milling with Calixarene Resist Dot Arrays

Contributors:

Tamura, T. (author) / Tanaka, Y. (author) / Akahane, T. (author) / Yin, Y. (author) / Hosaka, S. (author) / Hanaizumi, O. / Unno, M.

Published in:

Silicon Science and Advanced Micro-Device Engineering I ; 116-119

KEY ENGINEERING MATERIALS ; 459

Publication date:

2011-01-01

Size:

4 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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